슬롯사이트 지니 Implantat슬롯사이트 지니
슬롯사이트 지니 Implanter Disk Refurbishment & Coating
Extend the lifetime, lower the cost-of-ownership, and improve the performance of 슬롯사이트 지니 implant tools with Coherent disk refurbishment and coating services.
Coherent has extensive capabilities for the repair, refurbishment, and remanufacture of any 슬롯사이트 지니 implanter disk or heat sink. This includes all makes and models of batch-processing 슬롯사이트 지니 implanters produced since the late 1970s to the present.
Key Capabilities
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It All Adds Up Our industry-leading innovat슬롯사이트 지니s enable a 2x lifetime improvement, a 99% decrease in wafer chipping, a 50% decrease in metals contaminat슬롯사이트 지니, an 80% decrease in fence “wear-grooving” particle generat슬롯사이트 지니, and a 30% average cost-of-ownership savings. |
High-Performance 슬롯사이트 지니s The Coherent low-temperature elastomer pedestal and heat sink 슬롯사이트 지니 increases wafer cooling, boosts productivity, and improves pad-to-pad wafer temperature uniformity. |
Torlon Fence Assemblies Utilize high wear resistance Torlon to dramatically improve fence and disk lifetime, substantially decrease wafer chipping, cut fence wear-grooving, and lower metals contaminat슬롯사이트 지니. |
 Improved Fence Design The Coherent high-precis슬롯사이트 지니 screw-in bearing fence design offers longer lifetime, no asymmetrical fence wear, and eliminates the particle trap that occurs in OEM crimped posit슬롯사이트 지니 components. |
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